JPH0315336B2 - - Google Patents

Info

Publication number
JPH0315336B2
JPH0315336B2 JP60261848A JP26184885A JPH0315336B2 JP H0315336 B2 JPH0315336 B2 JP H0315336B2 JP 60261848 A JP60261848 A JP 60261848A JP 26184885 A JP26184885 A JP 26184885A JP H0315336 B2 JPH0315336 B2 JP H0315336B2
Authority
JP
Japan
Prior art keywords
holder
processing chamber
chamber
gate valve
diffusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60261848A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62122123A (ja
Inventor
Katsuya Okumura
Shinji Myazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP26184885A priority Critical patent/JPS62122123A/ja
Publication of JPS62122123A publication Critical patent/JPS62122123A/ja
Publication of JPH0315336B2 publication Critical patent/JPH0315336B2/ja
Granted legal-status Critical Current

Links

JP26184885A 1985-11-21 1985-11-21 縦型熱処理装置 Granted JPS62122123A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26184885A JPS62122123A (ja) 1985-11-21 1985-11-21 縦型熱処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26184885A JPS62122123A (ja) 1985-11-21 1985-11-21 縦型熱処理装置

Publications (2)

Publication Number Publication Date
JPS62122123A JPS62122123A (ja) 1987-06-03
JPH0315336B2 true JPH0315336B2 (en]) 1991-02-28

Family

ID=17367584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26184885A Granted JPS62122123A (ja) 1985-11-21 1985-11-21 縦型熱処理装置

Country Status (1)

Country Link
JP (1) JPS62122123A (en])

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0311621A (ja) * 1989-06-08 1991-01-18 Nec Corp 半導体ウエハ熱処理装置
US6036482A (en) * 1995-02-10 2000-03-14 Tokyo Electron Limited Heat treatment method
KR100407412B1 (ko) * 1995-02-10 2004-03-24 동경 엘렉트론 주식회사 열처리방법및그장치

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6029295B2 (ja) * 1979-08-16 1985-07-10 舜平 山崎 非単結晶被膜形成法
JPS56165317A (en) * 1980-05-26 1981-12-18 Fujitsu Ltd Manufacture of semiconductor device
JPS5875840A (ja) * 1981-10-30 1983-05-07 Fujitsu Ltd 半導体用加熱処理炉

Also Published As

Publication number Publication date
JPS62122123A (ja) 1987-06-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term